The fire started around 11:45 p.m. Wednesday on the unit block of Fresconi Court.
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Flames started outside one of the homes and then spread to the interior.
Officials say the fire then spread through the roof and extended to two neighboring homes.
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Everyone was evacuated from the houses. No one was hurt.
The fire marshal says someone intentionally started the fire in one townhouse.
The damage is estimated at $300,000.