Diego Fagundez and Juan Agudelo also scored for New England (10-9-6) and the Revolution benefited from an own goal by Philadelphia's Amobi Okugo. The Revolution got their second straight win and pulled into a tie with Houston for fifth place in the Eastern Conference.
Danny Cruz scored for the Union (10-8-8). Philadelphia, coming off back-to-back shutout victories, lost for just the second time in seven matches.
Rowe put the Revolution on the scoreboard in the 26th minute on a low shot from 25 yards out.
Cruz tied it in the 51st as he grabbed a through ball from Conor Casey before escaping Matt Reis and putting it into an open net.
Okugo's own goal put New England ahead for good in the 58th, and Rowe's second goal - from 30 yards out - stretched the lead to 3-1 just seven minutes later.
Fagundez made it a three-goal lead in the 71st with his team-leading eighth of the season, and Agudelo capped the scoring in the 73rd.
Okugo's night ended before the final whistle when he picked up a second caution and red card in stoppage time.
Union leading scorer Jack McInerney was benched as coach John Hackworth went with a one-striker formation that utilized Casey up top.